Specialized in RF MEMS devices fabrication, the Institute for Micro- and Nanotechnology (MNT) is a supplier for low and medium quantity MEMS devices. The MEMS process at the Institute MNT is based on the surface micromachining technology.
It has been developed for low loss circuitry using dielectric substrates and highly conductive, low permeability metallization - optimized for RF MEMS application. The technology enables various MEMS cross-sections and devices to be realized (fig. 1).
Other applications may include MOEMS, acoustic resonante sensors, accelerometers, and acoustic transducers.