Specialized in RF MEMS devices fabrication, the Institute for Micro- and Nanotechnology (MNT) is a supplier for low and medium quantity MEMS devices. The MEMS process at the Institute MNT is based on the surface micromachining technology.

It has been developed for low loss circuitry using dielectric substrates and highly conductive, low permeability metallization - optimized for RF MEMS application. The technology enables various MEMS cross-sections and devices to be realized (fig. 1).

Other applications may include MOEMS, acoustic resonante sensors, accelerometers, and acoustic transducers.

Fig. 1. Various MEMS cross-sections feasible in this technology

The applied process route is a result of over five years of work experience and development know-how gained from diverse MEMS structures realized and tested (fig. 2, fig. 3). The process refers to general design rules dimensions and tolerances, comparable to those provided by technical specification of thin film product suppliers.

Due to the transparent conductive bias electrode made of ITO, MOEMS become feasible within the same process. Optical applications can comprise controlled flexible mirrors and tunable cavities. The optical access enables for displacement detection and thus for actor-sensor systems.

Fig. 2. Ohmic contact MEMS switch implemented into a coplanar waveguide on a fused silica substrate
Fig. 3. RF phase shifter using reconfigurable loaded microstrip sections