Micro and Nano Structures
Ultra-small structures in the scale of micro- and nanometers are used in various applications, e.g. sensor technology. These structures are fabricated using photolithography or microcontact printing into a resist. These forms are being transferred into metallic or dielectric thin films by wet or dry etching (surface micromachining). Alternatively, the structures can be etched into substrates such as silicon or glass (bulk micromachining).
Expertise
Micro and nano structures are the core elements of microsystems (MEMS, MOEMS). We design and fabricate the structures for you
- Photolithography: Structuring of photosensitive resists
- Wet Chemical Etching of metals and glasses
- Dry Etching of silicon metals and glasses (DRIE, RIE, AOE)
- Micro Electroplating of metallic structures
- Surface Micromachining: Structuring of Thin Films (Coatings)
- Microcontact printing (uCP)
- Microinjection molding
Contact us
Prof. Dr. Martin Gutsche
Scientific Head at the Institute of Micro- and Nanotechnology
