PVD Sputtering Tool Radiance by Evatec

Materials:Dielectric films for laser mirrors, filters, bandpasses, etc.
Sputter modes:Reactive sputtering, DC and RF sputtering, DC pulsed
Deposition option:RF substrate bias
Substrate sizesUp to ∅ 200 mm
Substrate temperature:Up to 300 °C
Monitoring:In-situ optical film thickness monitoring (GSM)
Configuration:Loadlock for cassettes of up to 16 wafers
Manufacturer:Evatec AG