Hotplates HP150 & HP 310/350

Processes:Hotplates with Digital Temperature Control
Substrate Sizes:HP150 max. 150 mm Wafer; HP310/350 max. 300 mm Wafer
Temperature:25-250 °C, +/-1 °C at 100 °C
Loading:Manual
Chuck:Vacuum manually controlled
Manufacturer:Sawatec AG