PVD Sputtering Tool G&S

Processes:DC and RF magnetron sputtering
Materials: Pt, Ag, Al, AlCu, AlSi, Au, Au/Ni, Cr, Cu, Ni, Nb, Pd, TaSi, Ti, W/Ti, TiSi, other materials on request
Substrate sizes:∅ 100 mm 3 Pcs/Run, sequential coating only (no batch processing)