Micro and Nano Structures

Ultra-small structures in the scale of micro- and nanometers are used in various applications, e.g. sensor technology. These structures are fabricated using photolithography or microcontact printing into a resist. These forms are being transferred into metallic or dielectric thin films by wet or dry etching (surface micromachining). Alternatively, the structures can be etched into substrates such as silicon or glass (bulk micromachining).

Expertise

Micro and nano structures are the core elements of microsystems (MEMS, MOEMS). We design and fabricate the structures for you