Publikationen

Das Institut MNT hat seinen Fokus in der anwendungsorientierten Forschung und Entwicklung für die Industrie. Die allermeisten Projekte werden unter Geheimhaltungsverträgen durchgeführt. Über diese Ergebnisse werden keine Veröffentlichungen gemacht, ohne dass der Industriepartner seine explizite Zustimmung dazu gibt.

Die wissenschaftlichen Arbeiten sowie die seitens Auftraggeber freigegebenen Resultate werden von uns publiziert. Im Folgenden geben wir eine Übersicht unserer Veröffentlichungen nach Jahren geordnet.

Publikationen zum Kompetenzbereich Polymerics sind hier zu finden.

2010

  • Gubser M.; Gutsche M.; Künzli H.; Lenherr F.X.; Nicolussi G; Schreiner M. Charakterisierung und Modellierung einer Hohlkathodenplasmaquelle. Conference Procedings DOMIT, 5. Dornbirner Mikrotechniktage (2010). Paper und Präsentation.
  • Kremmel J.; Michler M.; Betschon F.; Halter M. Passive Multimode-Lichtleiter-Funktionsstrukturen für Sensorik-Anwendungen. Conference Procedings DOMIT, 5. Dornbirner Mikrotechniktage (2010). Paper und Präsentation.

2009

2008

  • Apel E.; Deubener, J.; Bernard A.; Höland M.; Müller R.; Kappert H.; Rheinberger V.; Höland W. Phenomena and mechanics of crack propagation in glass-ceramics. Journal of Mechanical Behavior of Biomedical Materials 1 (2008) 313-325
  • Bieberle-Hütter A.; Beckel D.; Infortuna A.; Muecke U. P.; Rupp J. L.M.; Gauckler L. J.; Rey-Mermet S.; Muralt P.; Bieri N. R.; Hotz N.; Stutz M. J.; Poulikakos D.; Heeb P.; Müller P.; Bernard A.; Gmür R.; Hocker T. A micro-solid oxide fuel cell system for battery replacement. J. Power Sources 177, (2008) 123-130
  • Güttinger J.; Bernard A. Nanobasierte Sensorsysteme. Sensor Report 4, (2008) 12-13
  • Heeb P.; Bernard, A. Fabrication of Micro Solid Oxide Fuel Cell. Poster für Advances in Ceramic Science and Engineering, ETH Zürich, Hönggerberg, 5.9.2008
  • Dietrich K.; Michler M.; Halter M. Electrical Optical Circuit Board (EOCB). Tagungsband Dornbirner Mikrotechniktage 2008, Mai 2008
  • Heeb, P.; Bernard, A. Microfabricated solid oxide fuel cell running on butane. Tagungsband Dornbirner Mikrotechniktage 2008, Mai 2008
  • Mathuni J.; Ahrens G.; Cucinelli M.; Engelke R.; Genolet G.; Grützner G.; Gutsche M.; Löchel B.; Mertsch O.; Schondelmaier D. Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique. Conference Proceedings MiNaT, Stuttgart, October 7th - 9th, 2008, p. 19
  • Engelke R.; Mathuni J.; Gutsche M.; Löchel B.; Genolet G. Schnelles Removal von SU-8 Photoresist. Mikroproduktion 5, 2008, p. 20
  • Mathuni J.; Engelke R.; Löchel B.; Gutsche M.; Genolet M. Schnellstes Fertigungsverfahren für Epoxid-Removal. wt-online 11/12, 2008, p.974-978

2007

  • Lang S.; Philipsborn A. C.; Bernard A.; Bonhoeffer F.; Bastmeyer M. Growth cone response to ephrin gradients produced by microfluidic networks. Anal. Biolanal. Chem. 388 (2007)
  • Luchsinger D.; Goldberg N.; Sabev P.; Metz S.; Onda N.; Hinrichs R.; Werner W. Embedding Resistors On Ceramic Substrate In Flex PCBs. OnBoard Technology, Febr. 2007, 14-17
  • Chatras M.; Onda N, Nigg P.; Tschanun W. RF-Membrane Filter Production and Packaging Challenge. Poster
  • Gentsch J.; Buehler C.; Auer W.; Buser R.; Kindle R.; Zellweger M.; Bless M.; Suter M. Chip Based Titration Unit with Optical Detection Window for Confocal Microscop Access. Lab Automation 2007; January 27-31, Poster TP 75
  • Engelke R.; Mathuni J.; Ahrens G.; Grützner G.; Bednarzik M.; Schodelmeier D.; Löchel B.; Gutsche M.; Cucinelli M. Untersuchungen eines neuen hochproduktiven Plasmaverfahrens zum Entfernen von SU8 nach der Abformung metallischer LIGA Mikroteile. Mikrosystemtechnik Kongress, 2007, Dresden
  • Gentsch J.; Buehler C.; Auer M.; Buser R.; Kindle R.; Zellweger M.; Bless M.; Suter M. Chip Based Tiration Unit with Optical Detection Window for Confocal Microscope Access. Lab Automation 2007, January 27-31, 2007.
  • Gentsch J.; Buehler M.; Auer M.; Buser R.; Kindle R.; Zellweger M. Chip based titration unit with optical detection window for confocal microscope access. Nanotech 2007, November 14-16, 2007, Montreux.

2006

  • Philipsborn A.C.; Lang S.; Bernard A.; Loeschinger J.; David Ch.; Lehnert D.; Bastmeyer M.; Bonhoeffer F. Microcontact printing of axon guidance molecules for generation of graded patterns. Nature Protocols Vol. 1, No. 3, 1322 (2006)
  • Haueis M.; Dual J.; Buser R. A mechanical isolation of a bending resonator. Sensor and actuators A, Physical, 2006, Vol. 128, No. 2, 257-264
  • Philipsborn A.C.; Lang S.; Loeschinger J.; Bernard A.; David Ch.; Lehnert D.; Bonhoeffer F.; Bastmeyer M. Growth cone navigation in substrate-bound ephrin gradients. Development 133 (2006) 2487-2495
  • Lange S.A.; Roth S.; Wittemann S.; Lacoste T.; Vetter A.; Grässle J.; Kopta S.; Kolleck M.; Breitinger B.; Wick M.; Hörber J.K.H.; Dübel S.; Bernard A. Measuring Biomolecular Binding Events with a Compact Disc Player Device. Angewandte Chemie Internal Edition 45 (2006) 270-273
  • Höland W.; Rheinberger V.; Apel E.; van't Hoen Ch., Höland M.; Dommann A.; Obrecht M.; Mauth C.; Graf-Hauser U. Clinical application of glass-ceramics in dentistry. Journal of Materials Science, Materials in Medicine Vol. 17 (2006) 1037-1142
  • Perry J.P.; Kündig A.A.; Höland M.; Dommann. A. Oxygen Impurity Sequestering in amorphous Zr-Al-Ni-Cu-Ti alloys by Scandium Addition. Materials Science and Engineering A417 (2006) 294-298
  • Gutsche M., Bernard A.; Onda N.; Buser R. Massgeschneiderte Entwicklungs- und Innovationsprojekte in der Mikro- und Nanotechnik. Nanotechnologie in Bayern, 2006 media-mind, München
  • Cucinelli M.; Lerch H.; Nellissen T.; Födisch R.; Malzer A.; Bleidiesel G.; Ünaf N.; Hofmann U. Mask Aligner Lithography; Pushing the Limits, Poster. MNE'06; 32 nd Conference on Micro- and Nano Engineering 2006, 17.-20.9.06, Barcelona
  • Sharkeev Y.P.; Bull S.J.; Perry A.J.; Michler M. On high dose nitrogen implantation of PVD titanium nitride. Surface and Coatings Technology 200 (2006) 5915-5920
  • Meier M.; Bertsch D.; Onda N.; Etter M.; Gutsche M.; Dommann A.; Valerio R.; Nicolet M-A. Laser Trimming of Amorphous Ta42Si13N45 Thin Films with Ultrashort Pulses. Microelectronic Engineering 83, (2006) p. 2234-2237, Proceedings of the 15th MAM Conference 2006

2005

  • Höland M.; Dommann A.; Höland W.; Apel E.; Rheinberger V. Microstructure formation and surface properties of a rhenanite-type glass-ceramic containing 6.0 wt% P2O5. Glass Science and Technology 78 (2005) Nr. 4 153-158
  • Gentsch J.; Buser R.; Nigg M.; Widmer S.; Bless M.; Sutter M. Micro fluidic Flow Control in Life Science Application. Society for Biomolecular Screening 11th Annual Conference Exhibition; Drug Discovery: From Target to Candidates, September 11-15, 2005 Geneve, Switzerland, Awarded Poster Nr. P03018

2004

  • Kündig A.A.; Dommann A.; Johnson W.L.; Uggowitzer P.J. High aspect ratio micro mechanical structures made of bulk metallic glass. Materials Science and Engineering A. (2004).
  • Buschbeck H.M.; Erhart A.; Goeggel Y.; Rosenblad C.; Wiltsche S.; Ramm J.; Dommann A.; Kummer M. Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy. Applied Surface Science 224 (2004) 36-40.
  • Dommann A.; Cucinelli M.; Nicolet W.; Nicolet M.-A.-J. Bridging the Micro and Nanoworlds; Amorphous Electrically Conducting Materials for Transducer Applications. The Nano-Micro Interface, Weinheim, 2004, 239

2003

  • Kündig A.A.; Cucinelli M.; Uggowitzer P.J.; Dommann A. Preparation of high aspect ratio surface microstructures out of a Zr-based bulk metallic glass. Microelectronic Engineering 67-68(2003)405.
  • Chabanne G., Erhart A.; Goeggel Y.; Rosenblad C.; Turlot E.; Wiltsche S.; Ramm J.; von Kaenel H.; Kummer M.; Dommann A. Novel Plasma-Enhanced Growth of SiGe in a 200 mm/300 mm Single Wafer Cluster Tool.  SEMI Technology Symposium: Innovations in Semiconductor Manufacturing, SEMICON/West, San Francisco, July 15, 2003.
  • Dubois P.; van Gunten S.; Enzler A.; Lippuner U.; Dommann A.; de Rooij N. F. Reciprocating silicon microtribometer. Reability, Testing, and Characterization of MEMS/MOEMS. SPIE 4980 (2003) 163-174.
  • Dommann A.; Enzler A.; Onda N. Advanced x-ray analysis Techniques to Investigate Aging of Micromachined Silicon Actuators for space Application. Microelectronics Reliability, 43 (2003) 1099-1103.
  • Rosenblad C.; Kummer M.; Deller H.-R.; Graf T.; Dommann A.; Hackbarth T.; Höck G.; Müller E.; von Känel H. Low Energy Plasma Enhanced Chemical Vapor Deposition - Plasma enhanced deposition of epitaxial Si and SiGe. Warrendale, PA: Materials Research Society (2003), (MRS Symp. Proc. 696).

2002

  • Kündig A.A.; Lepori D.; Perry A.J.; Rossmann S.; Blatter A.; Dommann A.; Uggowitzer P.J. Influence of low oxygen contents and alloy refinement on the glass forming ability of Zr52.5Cu17.9Ni14.6Al10Ti5.  Materials Transactions 43 (2002), 3206-3210.
  • Kummer M.; Rosenblad C.; Dommann A.; Hackbarth T.; Höck G.; Zeuner M.; Müller E.; von Känel H. Low energy plasma enhanced chemical vapor deposition. Materials Science and Engineering B 89 (2002), 288-295.
  • Baechi D.; Buser R.; Dual J. A high density microchannel network with integrated valves and photodiodes. Sensors and Actuators A 95 (2002), 77-83.
  • Buser R. EMS devices for laboratory automation in the biomedical field. mstnews 1/02 (2002), 4-6.
  • Enzler A.; Herres N.; Dommann A. Analysis of etched cantilevers. Microelectronics Reliability 42 (2002), 1807-1809.

2001

  • Baechi D.; Dual J.; Buser R. A high density microchannel network with integrated valves and photodiodes. Proc. of the 14th IEEE International Conference on Micro Electro Mechanical Systems 2001 (2001), 463-466.
  • Baechi D.; Buser R.; Dua, J. High-density microvalve arrays for sample processing in PCR chips. Journal of Biomedical Microdevices 3 (2001), 183-190.
  • Buser R.; Büchel D.; Bächi D.; Day P. Universal integrated diagnostic sample preparation for rapid quantitative and qualitative nucleic acid analysis. Obermeier E. (ed.): Proc. 11th  Int. Conf. on Solid-State Sensors and Actuators (Transducers ’01 Eurosensors XV). Berlin: Springer (2001), 3D1.19P.
  • Cavalloni C.; Gnielka M.; von Berg J.; Haueis M.; Dual J.; Buser R. A fully packaged micromachined single crystalline resonant force sensor. Proc. Sensor 2001. Nürnberg. P1.21.
  • Dommann A.; Herres N.; Krink M.; Galiano J.J.; Staempfli, B. Internal stresses and lifetime evaluation of PECVD isolating layers. Microsystem Technologies 7 (2001), 161-164.
  • Haueis M.; Dual J.; Cavalloni C.; Gnielka M.; Buser R. Packaged single crystalline microresonator for force sensing. In: Reichl, H. (ed.): MICRO SYSTEM Technologies 2001. Berlin, Offenbach: VDE Verlag (2001), 261-266.
  • Haueis M.; Dual J.; Cavalloni C.; Gnielka M.; Buser R. A fully packaged single crystalline resonant force sensor. Journal of Micromechanics and Microengineering 11 (2001) 514-521.
  • Michler M.; Dommann A. Nanohardness measurements for industrial applications. Zeitschrift für Metallkunde 92 (2001), 1035-1039.
  • Perry A.J.; Bull S.J.; Dommann A.; Michler M.; Wood B.P.; Rafaja D.; Matossian J.N. The smoothness, hardness and stress in titanium nitride following argon gas cluster ion beam treatment. Surface and Coatings Technology 140 (2001), 99-108.
  • Mrosk J.M.; Berger L.; Ettl C.; Fecht H.-J.; Fischerauer G.; Dommann A. Materials issues of SAW sensors for high-temperature applications. IEEE Transactions on Industrial Electronics 48 (2001), 258-264.
  • Reiche M.; Haueis M.; Dual J.; Buser R. Multiple wafer bonding for MEMS applications. Haynes, T.E. et al. (eds.) Wafer Bonding and Thinning Techniques for Materials Integration. Warrendale, PA: Materials Research Society (2001), I.7.2.1-II.7.2.6. (MRS Symp. Proc. 681E)
  • Szita N.; Sutter R.; Dual J.; Buser R. A. A micropipettor with integrated sensors. Sensors and Actuators A 89 (2001), 112-118.

2000

  • Perry A. J.; Bull S.J.; Dommann A.; Rafaja D.; Wood B.P.; Michler M. The sputtering damage in titanium nitride associated with lateral sputtering by Argon cluster ions. Surface and Coating Technology 133-134 (2000), 253-258.
  • Mukhamedzhanov E.; Kummer M.; Dommann A. Triple-crystal diffractometry, x-ray standing wave and reciprocal space mapping study of homoepitaxial grown Si layers. Journal of Physics D: Applied Physics 33 (2000), 2087-2091.
  • Rosenblad C.; Kummer M.; Müller E.; Dommann A.; von Känel, H. Structural and electrical characterization of Si-MODFET structures grown at high rates by LEPECVD. Warrendale, PA: Materials Research Society (2000), O7.9.1. (MRS Symp. Proc. 587)
  • Rosenblad C.; Kummer M.; Dommann A.; Müller E.; Gusso M.; Tapfer L.; von Känel H. Virtual substrates for the n- and p-type Si-MODFET grown at very high rates. Materials Science and Engineering B 74 (2000), 113-117.
  • Dommann A.; Herres N.; Krink M.; Galiano J.J.; Staempfli B. Internal stresses and lifetime evaluation of PECVD isolating layers. Proc. 3rd Int. Conf. and Exhibition MicroMat 2000. Dresden: ddp Goldenbogen (2000)
  • Baechi D.; Buser R. Suspension Handling System. Sensors and Actuators B 63 (2000), 195-200.
  • Rosenblad C.; Kummer M.; Dommann A.; Müller E.; Gusso M.; Tapfer L.; von Känel H. A plasma process for ultrafast deposition of SiGe graded buffer layers. Applied Physics Letters 76 (2000), 427-429.
  • Baechi D.; Buser R.; Dual J. From Micro- to Nanoparticle Manipulation. Journal of Nanoparticle Research 2 (2000), 393-399.
  • Haefliger D.; Baechi D.; Dual J.; Buser R. Thermal optimization of a micro valve array. Microsystem Technologies 6 (2000), 229-234.
  • Haueis M., Dual J., Cavalloni C., Gnielka M., Buser R. Packaged bulk micromachined resonant force sensor for high temperature applications. Courtois, B. et al (eds): Design, Test, Integration, and Packaging of MEMS/MOEMS. Bellingham: SPIE (2000), 379-388 (SPIE Proc. Vol. 4019).